{
  "@type": "dcat:Dataset",
  "accessLevel": "public",
  "accrualPeriodicity": "irregular",
  "bureauCode": [
    "006:55"
  ],
  "contactPoint": {
    "@type": "vcard:Contact",
    "fn": "Justin Gorham",
    "hasEmail": "mailto:justin.gorham@nist.gov"
  },
  "description": "The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].",
  "distribution": [
    {
      "accessURL": "https://dx.doi.org/10.18434/T4MK5P",
      "description": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82",
      "format": "text/html",
      "mediaType": "text/html",
      "title": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82"
    },
    {
      "accessURL": "https://www-s.nist.gov/srd_online/index.cfm?fuseaction=home.main&productID=SRD82v1.3",
      "description": "This database is free, but requires that a form be filled out in order to be able to download.",
      "title": "Form to download the database"
    }
  ],
  "identifier": "ECBCC1C130092ED9E04306570681B10715",
  "keyword": [
    "Auger electron spectroscopy",
    "ESCA",
    "XPS",
    "depth distribution function",
    "effective attenuation length",
    "electron spectroscopy for chemical analysis",
    "material database",
    "photoelectron",
    "photoelectron spectroscopy",
    "photoemission",
    "surface analysis",
    "x-ray photoelectron spectroscopy"
  ],
  "landingPage": "https://www.nist.gov/srd/nist-standard-reference-database-82",
  "language": [
    "en"
  ],
  "license": "https://www.nist.gov/open/license",
  "modified": "2011-01-01 00:00:00",
  "programCode": [
    "006:052"
  ],
  "publisher": {
    "@type": "org:Organization",
    "name": "National Institute of Standards and Technology"
  },
  "references": [
    "https://dx.doi.org/10.1116/1.3071947",
    "https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf"
  ],
  "theme": [
    "Standards:Reference data"
  ],
  "title": "NIST Electron Effective-Attenuation-Length Database - SRD 82"
}