{"@type": "dcat:Dataset", "accessLevel": "public", "bureauCode": ["006:55"], "conformsTo": "https://www.iso.org/standard/56211.html", "contactPoint": {"fn": "Dale E. Newbury", "hasEmail": "mailto:dale.newbury@nist.gov"}, "description": "EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.", "distribution": [{"description": "A collection of 5 keV electron excited X-ray spectra measured on an energy dispersive X-ray spectrometer with the necessary standards and meta-data.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2853/5keV_Analysis_Spectrum_Archive.zip", "format": "ZIP file", "mediaType": "application/x-zip-compressed", "title": "5 keV X-ray spectra"}], "identifier": "ark:/88434/mds2-2853", "issued": "2023-01-11", "keyword": ["EDS", "SDD", "SEM", "SEM-EDS", "X-ray spectrometry", "energy dispersive X-ray spectrometry", "low beam energy", "low keV", "scanning electron microscopy", "silicon-drift detector"], "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2022-12-06 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Chemistry:Analytical chemistry", "Materials:Ceramics", "Materials:Composites", "Materials:Materials characterization", "Materials:Metals", "Metrology:Amount of substance"], "title": "Data to accompany \"Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!\""}