Zeiss NVision 40 FIB

Metadata Updated: March 8, 2017

Description:CORAL Name: ZEISS FIBThis workstation combines Focused Ion Beam and Gemini Scanning Electron Microscope colums to enable the study of nanoscale-level materials and physical failure analysis in industrial production as well as state-of-the-art research in Nanotechnology, Materials and Life SciencesSpecifications / Capabilities:SEM Resolution: 1.1 nm @ 200kV, 2.5 nm @ 1kVFIB Resolution: 4.0 nm @ 30kVSEM Magnification: 30x - 900kxFIB Magnification: 475x - 500kxGas Injection: 4 ChannelUp to two different solid state precursorsUp to four different gaseous or liquid precursorsWide range of precursors options including W, Pt, C, and silicon oxide insulator depositionDetectorsIn-column EsB and BSEIn-lens: SE detectorChamber: Everhart Thornley type SE detectorChamberTwo specimen exchange positions7 additional available ports for upgrade options3D Software for Image ReconstructionScientific Opportunities / Applications:Nanometer scale patterning and etching of materialsMicromanipulation and TEM sample prepCan accomodate substrates from smapp pieces to 100 mm wafers

Access & Use Information

Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Dates

Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

Metadata Source

Harvested from Federal Laboratory Consortium Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
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Flcbusinessurl https://flcbusiness.federallabs.org/#/laboratory/5681
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Harvest Source Title Federal Laboratory Consortium Data.json
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Source Hash f56c701bf6d3fb262e06107eec5e516c98b2ab1a
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