Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Skip to content
  • Feedback

    • Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

    Metadata Updated: July 29, 2022

    These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    Dates

    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier 77D21EEB60F37A2BE053245706819FDB1978
    Language en
    Data Last Modified 2018-10-17
    Category Materials:Materials characterization, Nanotechnology:Nanomechanics, Nanotechnology:Nanometrology, Electronics:Semiconductors
    Public Access Level public
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 59555e05-dc04-42d1-8338-93d3cf795878
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/77D21EEB60F37A2BE053245706819FDB1978
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash 593bbff6e71d93b84622fbca53ee925badbd45b7
    Source Schema Version 1.1

    Didn't find what you're looking for? Suggest a dataset here.