Silicon Micromachining for Millimeter- and Submillimeter-Wave Applications

Metadata Updated: May 2, 2019

The molecular and atomic transitions observed in the THz frequency range provide a wealth of information for astrophysics, as well as earth and planetary science. As science goals drive coherent guided wave technologies from the microwave into submillimeter devices, manufacturing tolerances are correspondingly tightened. Increasingly, the accuracy achievable by traditional precision metal fabrication techniques is insufficient to reliably define waveguide filter characteristics. In the proposed effort, we plan to use silicon micromachining techniques to demonstrate the fabrication of narrow bandpass filters at 220.5 GHz and 682.5 GHz. This approach will be used for development of future components used in suborbital and satellite instrument systems for THz remote sensing.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_93260
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context
Metadata Catalog ID
Schema Version
Catalog Describedby
Datagov Dedupe Retained 20190501230127
Harvest Object Id 34d42924-fcd4-48c8-af1e-32bc29fb4ad6
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2018-09-01
Homepage URL
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash e8cb5b2f1663721929cea60ec8f0becaf39cdbd5
Source Schema Version 1.1

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