Rapid Thermal Annealer: Modular Process Technology RTP-600x

Metadata Updated: March 8, 2017

Description:CORAL Name: RTAThis system uses 21-1200W lamps to control temperature ramps and steady state temperatures from 250 degrees to 1200 degrees C annealsSpecifications / Capabilities:Silicon Wafers onlyScientific Opportunities / Applications:Short time, high temperature annealsGrowth of Silicon DioxideActivate dopants after ion-implantCVD gass reflowsSintering

Access & Use Information

Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

Downloads & Resources

No file downloads have been provided. The publisher may provide downloads in the future or they may be available from their other links.

Dates

Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

Metadata Source

Harvested from Federal Laboratory Consortium Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
Unique Identifier 6F65091C-A3AC-4A33-8465-68828F99F5F9
Maintainer
Maintainer Email
None
Public Access Level public
Address1
Address2
Address3
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Expertise
Fax
Flcbusinessurl https://flcbusiness.federallabs.org/#/laboratory/5692
Harvest Object Id 1536bbc4-8dd6-4459-bdab-929cd1ac389b
Harvest Source Id 5859cfed-553c-48de-a478-b67b5225f6fc
Harvest Source Title Federal Laboratory Consortium Data.json
Mission
Owneroperatorcode
Phone
Postalcode
Repphone
Sizesqft 0
Source Datajson Identifier True
Source Hash 4b916ccf7afde7e0fc2f78d1a884160b2cb15773
Source Schema Version 1.1
Statecode
T2Website

Didn't find what you're looking for? Suggest a dataset here.