Picometer-Resolution MEMS Segmented DM, Phase I

Metadata Updated: May 2, 2019

Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, building a MEMS DM with a relatively large aperture that is flat in the unpowered state is challenging. Currently, a large portion of the mirror stroke must be used to flatten the MEMS DMs and in some cases, the DM stroke is not even sufficient to flatten the mirror. In the case of the large-stroke segmented MEMS DMs manufactured by Iris AO, there is sufficient stroke for wavefront correction after flattening. However, the resolution is significantly reduced because the dynamic range of the digital-to-analog converters (DAC) used to operate the DM is spread over multiple microns of stroke rather than the 0.5 ┬Ám range required to correct for aberrations in the telescope that feeds the coronagraph.

This Phase I SBIR will make substantial improvements in the fabrication process of MEMS segmented DMs that reduce the deleterious residual surface-figure errors. It will do so by systematically addressing the sources of the segment position variations as well as addressing low-spatial frequency chip bow that can result in large peak-to-valley deformations across the DM array. The Iris AO DM architecture will also be modified to enable picometer resolution actuation with ultra-precision drive electronics.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

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Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_9499
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Datagov Dedupe Retained 20190501230127
Harvest Object Id 72ff8fe7-0058-45f2-bd24-269eb262c04e
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2011-08-01
Homepage URL https://techport.nasa.gov/view/9499
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash d128c3527d6e4ee46d78247b8f7634c1b475c3bf
Source Schema Version 1.1

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