Photolithography and Micro-Fabrication/ Packaging Laboratories

Metadata Updated: March 8, 2017

The Photolithography and Micro-Fabrication/Packaging laboratories provide research level semiconductor processing equipment and facilities that do not require a full cleanroom environment. Photolithography facilities include a photoresist spinner, optical mask aligner, a developing hood, curing ovens, a plasma asher, and a profilometer in a yellow-room environment. Micro-fabrication and packaging facilities include thermal and electron-beam evaporators; solvent and acid hoods; an electroplating hood; an automatic dicing saw; flip-chip indium bump bonders; wire bonders; optical inspection microscopes; and a probe station with a semiconductor parameter analyzer for electrical characterization.

Access & Use Information

Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Dates

Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

Metadata Source

Harvested from Federal Laboratory Consortium Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
Unique Identifier 1D6AF508-7C31-4172-B2CF-5C9EA4F05811
Maintainer
Maintainer Email
None
Public Access Level public
Address1
Address2
Address3
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Expertise
Fax
Flcbusinessurl https://flcbusiness.federallabs.org/#/laboratory/5624
Harvest Object Id de708d0e-3b7c-4404-b895-baf730b2abe1
Harvest Source Id 5859cfed-553c-48de-a478-b67b5225f6fc
Harvest Source Title Federal Laboratory Consortium Data.json
Mission
Owneroperatorcode
Phone
Postalcode
Repphone
Sizesqft 0
Source Datajson Identifier True
Source Hash 672768551f1fe9c2b1f1aaf59d5f74c776a9085a
Source Schema Version 1.1
Statecode
T2Website

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