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On-Wafer Calibration Comparisons of Multiline TRL with Platinum and Gold Conductors

Metadata Updated: April 11, 2024

Here are included figures and other relevant data from the paper "On-Wafer Calibration Comparisons of Multiline TRL with Platinum and Gold Conductors" to be published in International Microwave Symposium 2024.Introduction: On-wafer calibrations are critical for measurements of embedded devices at the correct reference planes. A major challenge in on-wafer calibrations is the development of accurate calibrations that cover a frequency range from MHz to THz. Another challenge facing on-wafer measurements is the lack of calibrations that are directly traceable to the SI. The multiline TRL (TRL) calibration is a promising approach for high-frequency traceable on-wafer measurements. However, this calibration is often practically limited in the low frequency regime by space considerations. Here, we compare the performance of several calibrations with different footprint requirements. Specifically, we compare three calibration kits: TRL fabricated with Au conductors, TRL fabricated with Pt conductors, and a series resistor (SR) calibration kit. We find that both the Au and Pt calibration kits perform well approximately 100 MHz. Then, we compare the performance of the different TRL calibration kits with reduced numbers of lines to assess the impact of device footprint on calibration quality. We find that changing the conductor material does not substantially improve the quality of the TRL calibration at low frequencies, while increasing the length of the longest line does.

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Public: This dataset is intended for public access and use. License: See this page for license information.

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Dates

Metadata Created Date April 11, 2024
Metadata Updated Date April 11, 2024
Data Update Frequency irregular

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date April 11, 2024
Metadata Updated Date April 11, 2024
Publisher National Institute of Standards and Technology
Maintainer
Identifier ark:/88434/mds2-3130
Data First Published 2024-03-19
Language en
Data Last Modified 2023-12-08 00:00:00
Category Electronics:Electromagnetics, Electronics:Semiconductors
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 786dd45c-f424-4351-af99-c4ad3e1af4fd
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://data.nist.gov/od/id/mds2-3130
License https://www.nist.gov/open/license
Program Code 006:045
Source Datajson Identifier True
Source Hash 1db3358b7b52dbe6dcdafcd73169748d712aa0e1612ac49d39be88e0581f284b
Source Schema Version 1.1

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