Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes, Phase II

Metadata Updated: May 2, 2019

In the proposed SBIR Phase I program LGR will develop and deploy a novel instrument ("Optical Thermometer") that provides real-time, in situ, non-contact measurements of substrate temperature in optical coating reactors. The instrument will employ an inexpensive diode laser, fiber optic components, and established laser interferometry methods to determine substrate temperature at multiple locations with a replicate precision of better than 0.01 degrees C in a measurement time of less than 0.01 seconds. The precision may be improved with increasing measurement time, if desired. The "Optical Thermometer" will be demonstrated on optical substrates made of a variety of materials in state-of-the-art industrial reactors specializing in UV, visible, near-IR and mid-IR optical coatings. The fast response of the sensor will enable coaters to use, for the first time, precise measurements of bulk substrate temperature to identify temperature nonuniformities during the coating process, refine and improve coating processes in real time, and minimize interwafer and batch-to-batch variations through closed-loop process control.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_5996
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context
Metadata Catalog ID
Schema Version
Catalog Describedby
Datagov Dedupe Retained 20190501230127
Harvest Object Id 8f374f21-b639-4836-ac32-24d902ade561
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2009-06-01
Homepage URL
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 91074604d796f6651274042de76047e7bbeb956d
Source Schema Version 1.1

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