Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes, Phase I

Metadata Updated: July 17, 2020

The objective of the proposed SBIR Phase I program is to develop an instrument that provides real-time, in situ measurements of substrate temperature in optical coating reactors. The instrument will employ an inexpensive diode laser, fiber optic components, and established laser interferometry methods to determine substrate temperature at multiple locations with a replicate precision of better than 0.1 degrees C in a measurement time of less than 0.2 seconds. The precision may be improved with increasing measurement time, if desired. The instrument (an "optical thermometer") will be demonstrated on optical substrates made of a variety of materials in state-of-the-art industrial reactors specializing in UV, visible, near-IR and IR optical coatings. The fast response of the sensor will enable coaters to use, for the first time, precise measurements of bulk substrate temperature to identify temperature nonuniformities during the coating process, refine and improve coating processes in real time, and minimize batch-to-batch variations through closed-loop process control.

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Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Dates

Metadata Created Date August 1, 2018
Metadata Updated Date July 17, 2020

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date July 17, 2020
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_6129
Maintainer
TECHPORT SUPPORT
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id c65833a7-b35e-4ddc-93ba-2dc7220b12a4
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2006-07-01
Homepage URL https://techport.nasa.gov/view/6129
Data Last Modified 2020-01-29
Program Code 026:027
Source Datajson Identifier True
Source Hash 766bf1a96d3fa6229a5204257799a072224785f3
Source Schema Version 1.1

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