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    • NIST Nanocalorimeter DWG and DXF drawings for microfabrication mask generation

    Metadata Updated: July 29, 2022

    Four files are included in this data set for mask generation that can be used to produce photolithography contact masks to create NIST nanocalorimeters. Two different designs are included, each in AutoCAD .dwg format and a universal .dxf format. The masks are intended to be printed on 5 inch masks blanks used to pattern 100 mm (4 inch) wafers. The front drawings are used to pattern the metal layer that defines the contact pads and the combined heater / thermometer and includes alignment marks at the center of the mask and at approximately plus and minus 1 inch along the X-axis for front to back alignment. The rear drawings have already been mirrored and define the KOH etch windows used to create individual die and create the windows in the center of the nanocalorimeter. The dimensions of the windows was defined for a standard, nominal, 525 micron thick 100-mm wafer. Please cite the related paper "Guide to the Design, Fabrication and Calibration of NIST Nanocalorimeters" by Feng Yi, Michael D. Grapes, and David A. LaVan in the Journal of Research of the National Institute of Standards and Technology, Volume 124 (in press).

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

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    Dates

    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-2113
    Data First Published 2019-08-28
    Language en
    Data Last Modified 2019-08-26 00:00:00
    Category Materials:Materials characterization
    Public Access Level public
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 37cdfaa1-f89d-4c90-83ca-3974d022dd14
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/mds2-2113
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash 293a53c684c2207a17c1511f8aea5736005ff193
    Source Schema Version 1.1

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