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NIST Database of the Thermophysical Properties of Gases Used in the Semiconductor Industry

Metadata Updated: September 11, 2024

The 1999 Semiconductor Industry Association (SIA) International Technology Roadmap for Semiconductors (ITRS) identifies 'Equipment Modeling' as first in a list of 'Technology Requirements' and states that 'the drivers for equipment modeling are equipment design, process control, . . . ' The ITRS indicates that continuing research is needed to obtain experimental data for 'transport and thermal constants.' This Project will generate transport and thermodynamic property data for the gases used in semiconductor processing. The data will be useful for equipment modeling in chemical vapor deposition (CVD) processes and the data will also provide a rational basis for the calibration of mass flow controllers (MFCs) used to meter process gases. NIST is measuring the thermophysical properties of the process gases, the 'surrogate' gases, and binary mixtures of process and carrier gases. The process gases are used in CVD and the surrogate gases are used to calibrate MFCs. The results will be disseminated in this data base providing the heat capacity, thermal conductivity, viscosity, and the virial coefficients for the virial equation of state providing the pressure-density-temperature relation for the process gases.

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

References

https://dx.doi.org/10.1063/1.555580
https://dx.doi.org/10.1063/1.555967
https://dx.doi.org/10.1021/ie50497a037

Dates

Metadata Created Date March 11, 2021
Metadata Updated Date September 11, 2024
Data Update Frequency irregular

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date March 11, 2021
Metadata Updated Date September 11, 2024
Publisher National Institute of Standards and Technology
Maintainer
Identifier FDB5909746795200E043065706813E54129
Language en
Data Last Modified 2023-01-11 00:00:00
Category Chemistry:Thermochemical properties, Electronics:Semiconductors
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id c078195c-1748-4c2e-8d51-1ab7baaffff0
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor
License https://www.nist.gov/open/license
Program Code 006:052
Related Documents https://dx.doi.org/10.1063/1.555580, https://dx.doi.org/10.1063/1.555967, https://dx.doi.org/10.1021/ie50497a037
Source Datajson Identifier True
Source Hash e113d4578c80eaa22392f01424434d715c647f7e20cb88a012c25ebad4f0c349
Source Schema Version 1.1

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