NIST Database of the Thermophysical Properties of Gases Used in the Semiconductor Industry
Access & Use Information
Downloads & Resources
-
DOI Access to NIST Database of the...HTML
DOI Access to NIST Database of the Thermophysical Properties of Gases Used in...
-
Landing PageLanding Page
References
https://dx.doi.org/10.1063/1.555580 |
https://dx.doi.org/10.1063/1.555967 |
https://dx.doi.org/10.1021/ie50497a037 |
Dates
Metadata Created Date | March 11, 2021 |
---|---|
Metadata Updated Date | September 11, 2024 |
Data Update Frequency | irregular |
Metadata Source
- Data.json Data.json Metadata
Harvested from NIST
Additional Metadata
Resource Type | Dataset |
---|---|
Metadata Created Date | March 11, 2021 |
Metadata Updated Date | September 11, 2024 |
Publisher | National Institute of Standards and Technology |
Maintainer | |
Identifier | FDB5909746795200E043065706813E54129 |
Language | en |
Data Last Modified | 2023-01-11 00:00:00 |
Category | Chemistry:Thermochemical properties, Electronics:Semiconductors |
Public Access Level | public |
Data Update Frequency | irregular |
Bureau Code | 006:55 |
Metadata Context | https://project-open-data.cio.gov/v1.1/schema/data.json |
Schema Version | https://project-open-data.cio.gov/v1.1/schema |
Catalog Describedby | https://project-open-data.cio.gov/v1.1/schema/catalog.json |
Harvest Object Id | c078195c-1748-4c2e-8d51-1ab7baaffff0 |
Harvest Source Id | 74e175d9-66b3-4323-ac98-e2a90eeb93c0 |
Harvest Source Title | NIST |
Homepage URL | https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor |
License | https://www.nist.gov/open/license |
Program Code | 006:052 |
Related Documents | https://dx.doi.org/10.1063/1.555580, https://dx.doi.org/10.1063/1.555967, https://dx.doi.org/10.1021/ie50497a037 |
Source Datajson Identifier | True |
Source Hash | e113d4578c80eaa22392f01424434d715c647f7e20cb88a012c25ebad4f0c349 |
Source Schema Version | 1.1 |
Didn't find what you're looking for? Suggest a dataset here.