Miniaturized UHF, S-, and Ka-band RF MEMS Filters for Small Form Factor, High Performance EVA Radio, Phase II

Metadata Updated: May 2, 2019

In Phase II of this SBIR, Harmonic Devices (HDI) proposes to develop miniaturized MEMS filters at UHF, S-band and Ka-band to address the requirements of NASA's next-generation software defined EVA radio. The filters are a key enabler for this highly reconfigurable, fault tolerant, cell-phone sized EVA radio.

For UHF and S-band, HDI will employ its proprietary contour-mode aluminum nitride MEMS piezoelectric resonator technology. Processed on silicon substrates, the resonators have their natural frequency defined by the lateral, in-plane dimensions of the structure. This feature enables the definition of different frequencies directly at the CAD layout level. Thus, the low insertion loss UHF and S-band filters can be monolithically integrated into a single chip. For the Ka-band, HDI will employ coaxial 3D MEMS interdigital filters that exhibit low insertion and ripple in a miniaturized form factor. Several US companies have expressed a keen interest in HDI's technology.

In Phase I, HDI successfully proved the feasibility of employing the proposed UHF, S-band, and Ka-band filters in NASA's software defined EVA radio through simulation and microfabrication pilot studies. The filters can be monolithically integrated onto the same silicon substrate, resulting in substantial savings in board space. The objective of Phase II is to build the filter prototypes and deliver them to NASA for testing. The results of the Phase I feasibility study convincingly justify Phase II continuation.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

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Harvested from NASA Data.json

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Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_6227
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context
Metadata Catalog ID
Schema Version
Catalog Describedby
Datagov Dedupe Retained 20190501230127
Harvest Object Id d154ca6d-64b5-4990-a02f-8ab8f1c023ee
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2010-03-01
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Data Last Modified 2018-07-20
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Source Hash 567d53f3141661b0aa2ec5980f3658984e4b3ea4
Source Schema Version 1.1

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