MEMS/Electronic Device Design and Characterization Facility

Metadata Updated: March 8, 2017

This facility allows DoD to design and characterize state-of-the-art microelectromechanical systems (MEMS) and electronic devices. Device designers develop their own analytical and finite element models using combinations of custom and commercial software such as ANSYS, HFSS, and Matlab. To verify device performance, a host of equipment characterizes the MEMS/electronic devices including low and high frequency vector network analyzers; semiconductor parameter analyzers; scanning and tunneling electron microscopes; high resolution and high speed microscopy; laser Doppler vibrometry from mHz to 1.2 GHz; semi and full autoprobers;systems for characterizing on-chip energetic reactions and materials; and custom electronic test equipment for actuators and sensors.

Access & Use Information

Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Dates

Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

Metadata Source

Harvested from Federal Laboratory Consortium Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
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Flcbusinessurl https://flcbusiness.federallabs.org/#/laboratory/5618
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Harvest Source Id 5859cfed-553c-48de-a478-b67b5225f6fc
Harvest Source Title Federal Laboratory Consortium Data.json
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Source Hash c854bbe4eb3bff25696aee7a1a612c10cb1fc880
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