Low Cost, Vacuum Packaging of GN&C Sensors, Phase I

Metadata Updated: May 2, 2019

Micro-electro-mechanical System (MEMS)-based gyroscopes, accelerometers and rate sensors are essential to miniaturizing the guidance, navigation and control electronics of satellite systems. Wafer level packaging is the preferred method of sealing MEMS devices to achieve low cost. However, devices are currently housed in expensive hermetic packages. In the case of gyros, high vacuum levels need to be created and maintained to achieve high Q values. Current hybrid hermetic packages are expensive, heavy and bulky. Although there is considerable activity in developing wafer level sealing techniques, there is currently no universal approach to seal MEMS devices at the wafer level. SiWave proposes to develop a universal wafer level sealing technology that: does not require processing of the device wafer, achieves room temperature sealing enabling encapsulation of sensitive devices and provides for an evaporable getter to maintain a high vacuum over the life of the package. SiWave will package a very high accuracy, absolute pressure sensor to demonstrate the concept as well as to quantify the effectiveness of the proposed approach. Once sealed at the wafer level, the device can be singulated and packaged using conventional plastic packaging techniques or housed in a low cost, plastic enclosure depending on the application.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_4897
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Datagov Dedupe Retained 20190501230127
Harvest Object Id 5a470d58-3398-427c-abe7-404678a63c99
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2005-07-01
Homepage URL https://techport.nasa.gov/view/4897
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 7521582a16c0b065b957fe1a5e0bc8160a2856c7
Source Schema Version 1.1

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