Improved Yield, Performance and Reliability of High-Actuator-Count Deformable Mirrors, Phase II

Metadata Updated: February 28, 2019

The search for life on earth-like extrasolar planets has emerged as a compelling long-term scientific goal for NASA. That goal has inspired innovative space-based coronagraphs that aim to collect spectral data from earth-like planets orbiting stars in distant solar systems. NASA's SBIR Solicitation topic Proximity Glare Suppression for Astronomical Coronography calls specifically for small stroke, high precision, deformable mirrors and associated driving electronics scalable to 10,000 or more actuators. This research aims to overcome the two major technical problems that affect yield and lifetime of the micro-electro-mechanical system deformable mirrors (MEMS DMs) that currently define the state of the art for high-resolution wavefront control: (1) keyhole voids occurring during manufacturing (reducing manufacturing yield) and (2) field emission damage that occurs during device operation (reducing operational lifetime). In this project, the technical solutions to these problems that were demonstrated in the Phase I project will be integrated into a full DM wafer-scale surface-micromachining batch production run to make the first 100% working 2048-element MEMS DM. As a byproduct of the process enhancements developed in Phase I research, this run will feature unprecedented surface smoothness and exceptional device reliability and lifetime in addition to high yield. The devices will be produced in a form factor that can be used with the heritage coating, packaging, and testing technologies. They will fit into existing packages and will be controllable with existing driver technology. Consequently, they will allow rapid insertion of these new high-reliability DM devices into appropriate NASA test beds.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Dates

Metadata Created Date August 1, 2018
Metadata Updated Date February 28, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date February 28, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_89540
Maintainer
TECHPORT SUPPORT
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 2b29198d-6fb5-4f00-ab69-d7044e551f69
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2018-04-01
Homepage URL https://techport.nasa.gov/view/89540
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash ad01663623519443fd53995245362ad7c0e3f5f6
Source Schema Version 1.1

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