High Resolution Silicon Deformable Mirrors, Phase I

Metadata Updated: May 2, 2019

This proposal describes a plan to build a prototype small stroke, high precision deformable mirror suitable for space-based operation in systems for high-resolution imaging. The prototype DM will be fabricated through a novel combination of micromachining and wafer bonding steps, and will rely on single crystal silicon for all structural components, promising unprecedented thermal stability and optical quality. These DMs will have a 65 mm aperture diameter, 4096 of degrees of freedom, 1?m of stroke, and a highly reflective mirror surface that can be adjusted repeatably to within 1nm RMS over the controllable range of spatial frequencies. The device will address all fundamental requirements for DMs to be used in space-based applications, by combining the best features of conventional discretely-assembled macroscale DMs (e.g. large aperture, good optical quality, and high reliability) with the best features of integrated microelectromechanical system (MEMS) DMs fabricated using semiconductor processing techniques (e.g. nanometer-scale repeatability, scalability to >104 actuators, and compactness). By using the full area of a silicon wafer for each mirror, these MEMS DMs will be significantly larger than any previously-reported MEMS DM. The device architecture will parallel that of the highly successful commercial MEMS DMs that were pioneered by Boston Micromachines Corporation.

Access & Use Information

Public: This dataset is intended for public access and use. License: U.S. Government Work

Downloads & Resources


Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_5811
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Datagov Dedupe Retained 20190501230127
Harvest Object Id 9a117682-4424-4c89-bbc8-4835e6eb6506
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2005-07-01
Homepage URL https://techport.nasa.gov/view/5811
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 37c124868e7a27e88a69a4bdfa12650fc85edca1
Source Schema Version 1.1

Didn't find what you're looking for? Suggest a dataset here.