High Quality, Low-Scatter SiC Optics Suitable for Space-based UV & EUV Applications, Phase II

Metadata Updated: February 28, 2019

SSG Precision Optronics proposes the development and demonstration of a new optical fabrication process for the production of EUV quality Silicon Carbide (SiC) optics. The process combines three technologies to provide a cost and schedule effective solution for lightweight, thermally stable precision optics for EUV applications. First, near-net-shape cast SiC materials for monolithic lightweighted, SiC mirror substrates with minimal machining required. Second, a thin CVD SiC sputter deposition process applied to the mirror facesheet. This enables a low-scatter surface as well as high reflectance in the EUV band. Third, the application of Tinsley?s computer controlled optical surfacing (CCOS) grinding and polishing makes it possible to generate aspheres with extremely accurate surfaces. The manufacturing process proposed allows production of state-of-the-art SiC aspheric mirrors with numerous benefits compared to competing technologies and traditional processes: ?Excellent Surface Figure Accuracy ([HTML_REMOVED]0.01 waves RMS, over low and mid-spatial-frequency measurements); ?Ultra-low micro-roughness ([HTML_REMOVED]10 Angstroms RMS routine, [HTML_REMOVED]1 Angstrom RMS achievable); ?Improved yield; ?Very low areal densities (~10 kg/m2 at an aperture of 1 meter); ?Superior thermal stability (SiC bulk material properties); In Phase 2, SSGPO will demonstrate an optimized optical fabrication process by producing a SiC EUV flight-ready optic.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date February 28, 2019

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Harvested from NASA Data.json

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Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date February 28, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_7746
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 78bb954d-cab1-4a9b-91b8-bfd1d6cddf0f
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2005-11-01
Homepage URL https://techport.nasa.gov/view/7746
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 05fdef94bcf2d160f690aabea610c448effcfed6
Source Schema Version 1.1

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