High-Density Diffraction Imaging and Non-Imaging Grating Elements for EUV and X-ray Spectroscopy Fabricated by DUV Reduction Photolithography, Phase II

Metadata Updated: May 2, 2019

Diffraction gratings are powerful tools for the spectral analysis of electromagnetic radiation. Properties of gratings are determined by available fabrication means -- which have not changed substantially in 50 years. Modern photolithography, now approaching nanometer resolution, may revolutionize the way many gratings are made and, through greater design flexibility, how gratings function. Over 1011 pixels, each smaller than 100 nm and collectively spanning areas of multiple centimeters, can be addressed individually with nanometer-scale absolute positioning accuracy by modern lithographic tools, thereby making it possible to create gratings with virtually any desired line curvature, variable line spacing, length and thickness -- features largely beyond traditional fabrication means. LightSmyth Technologies proposes to leverage these state-of-the-art photolithographic patterning tools to design flat imaging gratings that combine dispersive grating function with one- and two-dimensional focusing. Importantly, diffractive, aka holographic, focusing may have substantially lower aberration in low f-number or high incidence angle configurations. Line spacing and curvature do the focusing. This design and fabrication strategy will be applied to the development of gratings for NASA's NEXUS effort and other advanced grating products of value to NASA and the commercial markets -- all of which leverage on the innovative fabrication platform LightSmyth brings to the diffractive market.

Access & Use Information

Public: This dataset is intended for public access and use. License: U.S. Government Work

Downloads & Resources


Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_6397
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Metadata Catalog ID https://data.nasa.gov/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Datagov Dedupe Retained 20190501230127
Harvest Object Id 68156076-1d98-4628-9c57-63dbf676895d
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2009-02-01
Homepage URL https://techport.nasa.gov/view/6397
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 884c0f79e7a9810e661d382faf377ba8de9efdb7
Source Schema Version 1.1

Didn't find what you're looking for? Suggest a dataset here.