Denton Vacuum Discovery-550 Sputterer

Metadata Updated: March 8, 2017

Description:CORAL Name: Sputter 2Similar to the existing 4-Gun Denton Discovery 22 Sputter system, with the following enhancements:Specifications / Capabilities:Flex-type gun cathodes. This presents a 3rd axis of adjustment for uniformity tuning and angular plasma presentation.The heating element is no longer a quartz lamp. The calrod backside assembly is much more stable and the heating uniformity is greatly improved.The PLC control touch screen interface has been improved as PLC/HMI technology has improved. Also used a Windows PC based system for recipie and data logging options.A three position throttle valve is used to limit conductance during sputtering.One magnetically enhanced gun has been added for ferro-magnetic materials significantly increasing the deposition rates.An option is being considered to obtain a rotating (Lazy-Susan type) of substrate chuck for optimum positioning of the substrate directly below the desired gun.Convenient for multilayers, superlattices, and unattended operations.Scientific Opportunities / Applications:Metals: electrical contacts, dry etch masks, nanoplasmonics, magnetic materialsOxides, nitrides: electrical isolation, etching masks

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Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

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Harvested from Federal Laboratory Consortium Data.json

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Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
Unique Identifier EA693C07-4D1E-42AE-90E8-402A6F7D0D44
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Public Access Level public
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Schema Version
Catalog Describedby
Harvest Object Id ff5896cf-48eb-40bd-9da5-d857770f4ff2
Harvest Source Id 5859cfed-553c-48de-a478-b67b5225f6fc
Harvest Source Title Federal Laboratory Consortium Data.json
Sizesqft 0
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Source Hash aa2992e24953f814f6df0db6ca6a8fb43b4a6ce0
Source Schema Version 1.1

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