Denton E-beam Evaporator #1

Metadata Updated: March 8, 2017

Description:CORAL Name: E-Beam Evap 1This is a dual e-beam/thermal evaporator for the deposition of metal and dielectric thin films. Materials available are: Ag, Al, Au, Co, Cr, Cu, Fe, Gd, Mo, Ni, Pd, Permalloy, Pt, Ta, Ti, W, Y, Yb, Al 2O 3, C, MgO, Si, SiO 2, TiO 2.Specifications / Capabilities:6-pocket electron gunTwo electrodes for thermal sourcesWafers from 50 to 150mmCapacity: 4 wafersCryopumped with a base vacuum of 8E-8TUniformity shield yielding thickness uniformity of 5% over 100mm wafersScientific Opportunities / Applications:Metallization for electrical contactsDry etch masksLift-off processesMagnetic studies

Access & Use Information

Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Dates

Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017

Metadata Source

Harvested from Federal Laboratory Consortium Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date March 8, 2017
Metadata Updated Date March 8, 2017
Publisher Federal Laboratory Consortium
Unique Identifier 6FD55C29-1A02-4822-B6A7-A1D28DE21825
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Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
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Flcbusinessurl https://flcbusiness.federallabs.org/#/laboratory/5679
Harvest Object Id c6298d3b-060c-4034-820d-1a53b5f6e350
Harvest Source Id 5859cfed-553c-48de-a478-b67b5225f6fc
Harvest Source Title Federal Laboratory Consortium Data.json
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Source Datajson Identifier True
Source Hash c3346eac99ac433bb3ce99e728cdf5aedf6830a2
Source Schema Version 1.1
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