Deep Ultraviolet Macroporous Silicon Filters, Phase I

Metadata Updated: May 2, 2019

This SBIR Phase I proposal describes a novel method to make deep and far UV optical filters from macroporous silicon. This type of filter consists of an array of parallel, independent leaky waveguides made in the form of a free-standing, two-dimensionally ordered silicon structure with pore walls coated by a dielectric multilayer. The proposed filters offer unmatched levels of rejection within a very wide rejection band combined with a high level of transmission within the pass band that can be centered throughout the deep and far UV range. In addition, unlike common interference-based filters, the spectral position of the pass and rejection bands will not depend on the angle of incidence. The proposed filters will be light weight and may be manufactured cost-effectively in large quantities. In Phase I, it is proposed to demonstrate the feasibility of the method by fabricating pore structures with different pore wall coatings and measuring the transmission and other optical properties. In Phase II, optimized filters will be fabricated and their properties compared with design predictions. Phase III will involve product design, fabricating filter structures to meet customers' physical as well as optical needs, and marketing and sales investments.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date August 1, 2018
Metadata Updated Date May 2, 2019
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_5594
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context
Metadata Catalog ID
Schema Version
Catalog Describedby
Datagov Dedupe Retained 20190501230127
Harvest Object Id b48ff669-6a0e-4b4e-a4d0-ab8af5bdede8
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2005-07-01
Homepage URL
Data Last Modified 2018-07-19
Program Code 026:027
Source Datajson Identifier True
Source Hash 800a891ed6ff8e834c3610e7ae89cbf1f09b0733
Source Schema Version 1.1

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