CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response, Phase II

Metadata Updated: April 5, 2018

In this Phase II SBIR project a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels will be developed. The outcome of the project is a capacitive microaccelerometer with a resolution of 90ng/sqrt-Hz over +/-0.1g range for Type A sensor and 0.8ug/sqrt-Hz over +/-1g for Type B sensor with programmable bandwidth from DC to programmable 0.1Hz-100Hz. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

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Public: This dataset is intended for public access and use. License: U.S. Government Work

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Dates

Metadata Created Date April 9, 2015
Metadata Updated Date April 5, 2018

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date April 9, 2015
Metadata Updated Date April 5, 2018
Publisher Space Technology Mission Directorate
Unique Identifier TECHPORT_6188
Maintainer
TECHPORT SUPPORT
Maintainer Email
Public Access Level public
Bureau Code 026:00
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 41b1b705-0dc2-4100-a408-4f8b2a2eff0a
Harvest Source Id 39e4ad2a-47ca-4507-8258-852babd0fd99
Harvest Source Title NASA Data.json
Data First Published 2007-12-01T08:00:00.000Z
Homepage URL https://techport.nasa.gov/view/6188
Language en-US
License http://www.usa.gov/publicdomain/label/1.0/
Data Last Modified 2017-09-16T00:00:00.000Z
Program Code 026:027
Publisher Hierarchy National Aeronautics and Space Administration > Space Technology Mission Directorate
Source Datajson Identifier True
Source Hash ebfa34dbfa51fbce12171e31b1d5b867c711216c
Source Schema Version 1.1

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