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2 datasets found

Federal

An example data set to demonstrate the usage of M.o.R., a shiny app for model-based metrology.

National Institute of Standards and Technology —

This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the...
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Federal

Model-Based Optical Metrology in R: M.o.R.

National Institute of Standards and Technology —

Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand...
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2 datasets found

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